光刻与薄膜覆盖
光刻
薄膜覆盖
MEMS
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 The MEMS and microfluidics market is vast with applications as far reaching as inkjet, biotechnology assays, lab-on-a-chip, chromatography, fuel cells, and industrial diagnosis. Based on many years serving the research community, FSM has utilized a number of novel materials and techniques to help scale microfluidic products, which include selecting low fluorescence silicon and glass materials and etching to build channels and reservoirs. We can scale microfluidic and MEMS parts from research and development to high volume manufacturing.
 
Silicon channels (~400 nanometers)



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