添加时间:2017-11-21 02:29:02 浏览506 来源:本站
Diameter | 76.2 +/- 0.63 mm | 76.2 +/- 0.63 mm |
Type / Dopant | P/Boron | P/Boron |
Orientation | <100> +/- 1º | <100> +/- 1º |
Grade | Test | Prime |
Resistivity | 1 - 100 Ω-cm | 10 - 20 Ω-cm |
Radial Resisivity Gradient | — | As Specified |
Oxygen | — | As Specified |
Carbon | — | As Specified |
Metals | < 5 x E10 atoms/cm2 | < 5 x E10 atoms/cm2 |
Thickness | 381 +/-50 μm | 381 +/- 25 μm |
TTV | <= 10 μm | <= 10 μm |
GTIR | ||
Bow / Warp | <= 50 μm | <= 40 μm |
Flats |
1 or 2 SEMI Standard |
1 or 2 SEMI Standard |
Particle Count | <= 50 @ >= 0.3 μm | <= 20 @ >= 0.3μm |
Polished | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |
Etched | Single Side Polished or Double Side Polished | Single Side Polished or Double Side Polished |