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Custom Film Coatings

 
FSM offers a wide variety of films processing solutions.We have long term experience depositing single layer films or complex film stacks.Our deposition capabilities include thermal processing, LPCVD, PECVD, PVD, electroplating and evaporation or can provide custom films processing solutions to your specific requirements.

Below is a list of FSM's most common films:
Thermal Oxide
CVD Oxide
Low k: Black Diamond庐, Coral庐, Spin On
Thick Oxide
Particle Sensitive Oxide
PETEOS
Low Particle Teos
Silicon Carbide (SiC
BPSG, PSG, USG
Polysilicon (Doped and Undoped)
Amorphous Silicon
Photoresist: I-line, 248nm DUV, 193nm Thick Photoresist
Oxynitride (SiON)
LPCVD Nitride
PECVD Nitride
Low Stress Nitride
Diamond
Diamond-Like Carbon (DLC)
Metals: PVD, CVD, Electroplated, Evaporated, Al, Ta, Ti, TiN, TiW, TaN, WN, Cr, Cu, Al-Cu, Ni, Ru, SiC, SiCN, A-Si, Pd, Co, NiSi, TiO2, Pt, Ag, Au, etc.

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