CNENJP
Product Manual
Product Introduction
FSM provides 100mm and 150mm SiC wafers. With its hardness (SiC is the second hardest material in the world) and stability under heat and high voltage current, this material is being widely used in several industries.
Parameter Specification

Size:2,3,4,6 inches；

Crystal Direction:On axis：±0.5°for 6H-N/4H-N/4H-SI/6H-SI

Off axis：4.0° toward 1120±0.5°for4H-N/4H-SI

Thickness (um) :350±25

Diameter (mm) :50.8±0.3

Surface:Polish Ra≤1nm，CMP Ra≤0.5nm

FSM can provide various specifications of silicon carbide. If you have any needs, please consult and contact us.