Product Introduction

These are the silicon wafers which have been through either a Wet Thermal Oxide, or a Dry Thermal Oxide process, to “grow” a Thermal Oxide, or Silicon Dioxide (Sio2), layer on the surface of the wafer. This is done by exposing the wafer to a combination of oxidizing agents and heat. The oxide is most commonly used as a dielectric layer and in MEMs devices. Thermal Oxide is grown on both sides of the wafer, but can then be removed from one side if a single side oxide layer is needed.

Parameter Specification

200MM/300MM oxide wafers

200MM 300MM
Thickness 500±25nm 500±25nm
Thickness deviation(1 piece) < 3% < 3%
Thickness deviation(More than 2 pieces) < 3% < 3%
SPEC 0.2μm≦30ea 0.20um≤30ea
Diameter(mm) 200±0.2mm 300±0.2mm
Type P P
Notch orientation <100>±1 <100>±1
Resistivity(Ω・cm) 1-100 1-100
Thickness(μm) 725±25 775±25
TTV(μm) ≦25 ≦10
BOW(μm) ≦40 ≦40
WARP(μm) ≦40 ≦40
Surface Metals ≦5.0E 10 atom/cm2 <1 E10 Atoms/cm2
WARP(μm) ≦40 ≦40


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