Product Introduction

Our GaN (Gallium Nitride) wafers are grown using the Hydride Vapor Phase Epitaxy (HVPE) method, available in semi-insulating (Fe-doped) and N-type (Ge-doped or undoped) variants with C-plane <0001> orientation. These freestanding GaN wafers feature low dislocation density (EPD as low as 1~9E5/cm²), sub-nanometer front surface roughness (Ra ≤0.2nm), and tightly controlled TTV (≤15μm), bow, and warp (≤20μm), making them a high-quality, epi-ready substrate for demanding power and RF device applications.

Applications

- Power electronic devices (Schottky diodes, vertical power transistors)

- RF and high-frequency devices (HEMTs for 5G/6G applications)

- High-brightness LEDs and laser diodes

- High electron mobility transistors (HEMT) requiring low-defect,native GaN substrates

Why Choose Us? 

Free‑standing GaN substrates grown by HVPE process deliver superior crystal quality. 

Dislocation density as low as 1‑9×10⁵/cm², reaching industry‑leading performance. 

Extremely low front‑surface roughness (Ra ≤0.2 nm), compatible with high‑precision epitaxial growth. 

Suitable for core application scenarios of next‑generation power devices and 5G/6G RF devices.

Parameter Specification
GALLIUM NITRIDE (GAN) WAFER SPECIFICATIONS
GROWTH METHOD HVPE
Conduct Type Semi-Insulating N N
Type/Dopant Fe Ge Undoped
Size 10×10.5mm / 100.5 ± mm
OF location/length <1-100> ± 0.5° / 32.0 ± 1.0mm
IF location/length <11-20> ± 3° / 18.0 ± 1.0mm
Orientation C-plane<0001> off angle toward M-Axis 0.35° ± 0.15°
Resistivity(300k) ≧1E6 ohm-cm <0.05ohm.cm <0.5ohm.cm
EPD (1~9)E5/cm2,5E5~3E6/cm2,(1~3)E6/cm2
Ra(nm) Front surface Ra ≤0.2nm
TTV(um) ≤ 15
Bow(um) ≤ 20
Wrap(um) ≤ 20
Epi-ready Yes